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DTCO (Design-Technology Co-Optimization): 3nm Aware

Updated 18 May 2026

Contents & prerequisites

Prerequisites

Source Mask Optimization (SMO): Joint Source + Mask Opt.

Unlocks

GDS-II / OASIS: Layout Database Format, Layer Mapping

Article in preparation

DTCO (Design-Technology Co-Optimization): 3nm Aware

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Learning

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